SEMI C24 - Specification for n-Butyl Acetate

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in August 2013. Originally published in 1978; previously published March 2001.

 

The purpose of this Document is to standardize requirements for n-butyl acetate used in the semiconductor industry and to document testing procedures to support those specifications. Test methods have been shown to give statistically valid results.

 

The scope of this Document is for one grade of n-butyl acetate used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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