SEMI C25 - Specification for Dichloromethane (Methylene Chloride) -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C25-0306 - Superseded



This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006.


The purpose of this document is to standardize requirements for dichloromethane (methylene chloride) used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of dichloromethane for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.


Referenced SEMI Standards

SEMI C1 — Specifications for Reagents

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