SEMI C26 - Specification and Guide for Hexamethyldisilazane (HMDS)
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www.semiviews.org and www.semi.org in September 2012; originally published in 1983; previously published March 2006.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The purpose of this Document is to standardize requirements for hexamethyldisilazane used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 guidelines for method validation. This Document also provides a guide for a grade of hexamethyldisilazane for which a need has been identified. In the case of the guide, the test methods may not have been statistically validated yet.
The scope of this Document is for grades of hexamethyldisilazane used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals