SEMI C27 - Specification and Guide for Hydrochloric Acid -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C27-0918 - Current



This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at and in September 2018; originally published in 1978; previously published January 2018.


The purpose of this Document is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications. Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1. This Document also provides a Guide for tiers of hydrochloric acid for which a need has been identified. In the case of the Guide, the test methods may not have been statistically validated.


The scope of this Document is grades and tiers of hydrochloric acid used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C35 — Specification and Guide for Nitric Acid
SEMI C44 — Specification and Guide for Sulfuric Acid

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