SEMI C27 - Specification and Guide for Hydrochloric Acid -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  The purpose of this Standard is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications. Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1. This Standard also provides a Guide for tiers of hydrochloric acid for which a need has been identified. In the case of the Guide, the test methods may not have been statistically validated.
2  Scope
2.1  The scope of this Standard is grades and tiers of hydrochloric acid used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C35 — Specification and Guide for Nitric Acid
SEMI C44 — Specification and Guide for Sulfuric Acid

Revision History
SEMI C27-0918 (technical revision)
SEMI C27-0118 (technical revision)
SEMI C27-0708 (technical revision)
SEMI C27-0301 (technical revision)
SEMI C27-0600 (technical revision)
SEMI C27-0699 (first published - replaces SEMI C1.7, SEMI C7.2, SEMI C8.2, SEMI C11.6, and SEMI C12.2)

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