C02800 - SEMI C28 - フッ化ケイ素酸の仕様

Volume(s): Process Chemicals
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Liquid Chemicals Committeeで技術的に承認されている。現版は2006116日,global Audits and Reviews Subcommitteeにて発行が承認された。20062月にwww.semi.orgで,そして20063月にCD-ROMで入手可能となる。初版は1978年発行,前版は20057月に発行された。






Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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