SEMI C28 - Specification and Guide for Hydrofluoric Acid -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  The purpose of this Standard is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
2  Scope
2.1  The scope of this Standard is grades of hydrofluoric acid used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C28-0618 (technical revision)
SEMI C28-0611 (technical revision)
SEMI C28-0306 (technical revision)
SEMI C28-0705 (technical revision)
SEMI C28-0704 (technical revision)
SEMI C28-0301 (technical revision)
SEMI C28-0699 (first published - replaces SEMI C1.8, SEMI C7.3, SEMI C8.3, and SEMI C11.3)

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