SEMI C28 - Specification and Guide for Hydrofluoric Acid
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published in 1978; previously published June 2011.
The purpose of this Document is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
The scope of this Document is grades of hydrofluoric acid used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
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