SEMI C29 - Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C29-0618 - Current



This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at and in June 2018; originally published June 1999; previously published November 2010.


The purpose of this Document is to standardize requirements for 4.9% hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Document also provides a guide for grade of 4.9% hydrofluoric acid for which a need has been identified. In the case of the guide, the test methods may not have been statistically validated yet.


The scope of this Document is grades of 4.9% hydrofluoric acid used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C28 — Specification and Guide for Hydrofluoric Acid

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