SEMI C30 - Specification for Hydrogen Peroxide

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in February 2018; originally published in 1978; previously published November 2010.

 

The purpose of this Document is to standardize requirements for hydrogen peroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

 

The scope of this Document is grades of hydrogen peroxide used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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