SEMI C31 - Specification for Methanol
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at www.semiviews.org and www.semi.org in June 2015; originally published in 1978; previously published July 2008.
The purpose of this Document is to standardize requirements for methanol used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
The scope of this Document is all grades of methanol used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals