SEMI C31 - Specification for Methanol -
NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
The purpose of this Specification is to standardize
requirements for methanol used in the semiconductor industry and testing
procedures to support those standards. Test methods have been shown to give
statistically valid results.
The scope of this Specification is all grades of methanol
used in the semiconductor industry.
Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C31-0615 (technical revision)
SEMI C31-0708 (technical revision)
SEMI C31-0301 (technical revision)
SEMI C31-0699 (first published - replaces SEMI C1.10)
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