C03100 - SEMI C31 - Specification for Methanol

SEMI C31 - Specification for Methanol -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C31-0615 - Inactive

Revision

Abstract


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

The purpose of this Specification is to standardize requirements for methanol used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.


The scope of this Specification is all grades of methanol used in the semiconductor industry.

 

Referenced SEMI Standards (purchase separately)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

 

Revision History

SEMI C31-0615 (technical revision)

SEMI C31-0708 (technical revision)

SEMI C31-0301 (technical revision)

SEMI C31-0699 (first published - replaces SEMI C1.10)

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