SEMI C33 - Specifications for n-Methyl 2-Pyrrolidone -
NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
The purpose of this Standard is to standardize requirements
for n-methyl 2-pyrrolidone used in the semiconductor industry and testing
procedures to support those specifications. Test methods have been shown to give
statistically valid results. Alternative methods may be used as long as they
comply with SEMI C1 requirements for method validation.
The scope of this Standard is grades of n-methyl
2-pyrrolidone used in the semiconductor industry.
Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C33-0213 (technical revision)
SEMI C33-0301 (technical revision)
SEMI C33-0699 (first published - replaces SEMI C1.25, SEMI C7.16, and SEMI C8.11)
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