SEMI C33 - Specifications for n-Methyl 2-Pyrrolidone

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the global Liquid Chemicals Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2012. Available at www.semiviews.org and www.semi.org in February 2013; originally published in 1986; previously published March 2001.

 

The purpose of this Standard is to standardize requirements for n-methyl 2-pyrrolidone used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

 

The scope of this Standard is grades of n-methyl 2-pyrrolidone used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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