SEMI C36 - Specifications for Phosphoric Acid
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www.semiviews.org and www.semi.org in December 2013; originally published in 1981; previously published November 2007.
The purpose of this Document is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
The scope of this Document is for grades of phosphoric acid used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C35 — Specifications and Guides for Nitric Acid