SEMI C37 - Specification for Phosphoric Etchants
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2011. Available at www.semiviews.org and www.semi.org in June 2011; originally published in 1981; previously published July 2006.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
NOTICE: This Document was reapproved with minor editorial changes.
The purpose of this Document is to standardize requirements for phosphoric etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Document also provides guidelines for grades of phosphoric etchants for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.
The scope of this Document is all grades of phosphoric etchants used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C2 — Specifications for Etchants