SEMI C38 - Guideline for Phosphorus Oxychloride -
Abstract
This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in January 2005. Originally published in 1991; previously published June 1999.
NOTICE: This document was completely rewritten in 2006.
The purpose of this document is to provide guidelines for grades of phosphorus oxychloride for which a need has been identified.
Referenced SEMI Standards
None.
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C03800 - SEMI C38 - Guideline for Phosphorus Oxychloride
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