SEMI C38 - Guideline for Phosphorus Oxychloride -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C38-0306 - Superseded



This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at in January 2005. Originally published in 1991; previously published June 1999.


NOTICE: This document was completely rewritten in 2006.


The purpose of this document is to provide guidelines for grades of phosphorus oxychloride for which a need has been identified.


Referenced SEMI Standards


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