SEMI C39 - Specification for Potassium Hydroxide Pellets -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
2  Scope
2.1  The scope of this Standard is a grade of potassium hydroxide pellets used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C39-1110 (technical revision)
SEMI C39-1105 (technical revision)
SEMI C39-0699 (first published - replaces SEMI C1.14)

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