SEMI C39 - Specification for Potassium Hydroxide Pellets
This specification was technically approved by the global Process Chemicals Committee and is the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999; to be published June 1999. This document replaces SEMI C1.14 in its entirety. Originally published in 1978.
The purpose of this document is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of potassium hydroxide pellets for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.
Referenced SEMI Standards
SEMI C1 — Specifications for Reagents