
SEMI C40 - Specification for Potassium Hydroxide, 45% Solution -
Abstract
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
1 Purpose
1.1 The purpose of this Standard is to standardize requirements for 45% potassium hydroxide solution used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
2 Scope
2.1 The scope of this Standard is a grade of 45% potassium hydroxide solution used in the semiconductor industry.
Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
Revision History
SEMI C40-1110 (Reapproved 0618)
SEMI C40-1110 (technical revision)
SEMI C40-1105 (technical revision)
SEMI C40-0699 (first published)
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