SEMI C41 - Specification and Guide for 2-Propanol

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published in 1978; previously published July 2005.

 

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global technical committee to enhance the usage of the Standard or Safety Guideline.

 

The purpose of this Document is to standardize requirements for 2-propanol used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

 

The scope of this Document covers all grades of 2-propanol used in the semiconductor industry.

 

The VLSI grade purity level is typically required by semiconductor devices with geometries of 0.8 to 1.2 microns.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals



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