SEMI C44 - Specification and Guide for Sulfuric Acid -

Abstract

The first purpose of this Specification and Guide is to standardize requirements for Grades of sulfuric acid used in the semiconductor industry and to document testing procedures that may be used to support those requirements. Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation.

This Specification and Guide also provides assay and impurity limits for higher purity Tiers of sulfuric acid for which a need has been identified.

The scope of this Specification and Guide is two Grades and three Tiers of sulfuric acid used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specification and Guide for Hydrochloric Acid
SEMI C35 — Specification and Guide for Nitric Acid

Revision History
SEMI C44-1223 (technical revision)
SEMI C44-0618 (technical revision)
SEMI C44-0514 (technical revision)
SEMI C44-0708 (technical revision)
SEMI C44-0301 (technical revision)
SEMI C44-1000 (technical revision)
SEMI C44-0699 (first published - replaces SEMI C1.16, SEMI C7.8, SEMI C8.8, and SEMI C11.5)

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