SEMI C44 - Specification and Guide for Sulfuric Acid
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published in 1978; previously published May 2014.
The purpose of this Document is to standardize requirements for sulfuric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. This Document also provides a guide for grades of sulfuric acid for which a need has been identified. In the case of these grades, the test methods may not have been statistically validated yet.
The scope of this Document is all grades of sulfuric acid used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specification and Guide for Hydrochloric Acid
SEMI C35 — Specification and Guide for Nitric Acid