SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS)

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at and in May 2018; originally published June 1999; previously published June 2009.


The purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.


The scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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