C04500 - SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS)

SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS) -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI C45-0518 - Current

Revision

Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in May 2018; originally published June 1999; previously published June 2009.

　

The purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

　

The scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry.

　

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

You May also Like