SEMI C46 - Guide for 25% Tetramethylammonium Hydroxide
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in August 2012; originally published in 1991; previously published March 2006.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The purpose of this Document is to provide a guide for a grade of 25% tetramethylammonium hydroxide for which a need has been identified.
The scope of this Document lists the proposed impurity limits of 25% tetramethylammonium hydroxide used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals