C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

The purpose of this Standard is to provide a guide for a grade of trans 1,2 dichloroethylene for which a need has been identified.


The scope of this Standard lists the proposed impurity limits of trans 1,2 dichloroethylene used in the semiconductor industry.

 

Referenced SEMI Standards (purchase separately)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

 

Revision History

SEMI C47-0812 (technical revision)

SEMI C47-0706 (complete rewrite)

SEMI C47-0699 (first published - replaces SEMI C7.20)

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