SEMI C48 - Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade -

Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in August 2012; originally published in 1988; previously published July 2006.

　

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

　

The purpose of this Document is to standardize requirements for 1,1,1-Trichlorethane, Furnace Grade used in the semiconductor industry and testing procedures to support those standards.

　

*CAUTION: This material reacts violently with aluminum and white metals and this material is not be used for vapor degreasing (contains less than 0.05% inhibitors).

　

The scope of this Document covers grades of 1,1,1-Trichloroethane used in the semiconductor industry.

　

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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