SEMI C51 - Specification for Xylenes
The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results.
The scope of this Document is a grade of xylene used in the semiconductor industry.
This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o-, m-, and p- isomers) 99.0% min and Ethyl benzene 1% max.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals