C05100 - SEMI C51 - Specification for Xylenes

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results.


The scope of this Document is a grade of xylene used in the semiconductor industry.


This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o-, m-, and p- isomers) 99.0% min and Ethyl benzene 1% max.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00