SEMI C52 - Specification for the Shelf Life of a Specialty Gas -

Abstract

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published March 2001; previously published March 2012.

　

The purpose of this Document is to define terminology and to recommend minimum periods for the shelf lives of specialty gases. It is meant to provide consistency in terminology among gas suppliers and to provide a general guideline for users of these gases.

 

This Document applies to the shelf life of properly packaged, filled and analyzed specialty gases as stored or supplied by a specialty gas manufacturer or supplier. In this Document, shelf life is viewed from a quality point of view. The Document does not address safety aspects associated with the prolonged storage of gases.

　

Referenced SEMI Standards

None.

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