SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Document was reapproved with minor editorial changes.

 

The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00