SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the global Liquid Chemicals Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at and in March 2012; originally published November 2001; previously published July 2004.


NOTICE: This Document was reapproved with minor editorial changes.


The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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