SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Document was reapproved with minor editorial changes.


The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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