SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]
NOTICE: This Document was reapproved with minor editorial changes.
The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals