SEMI C54 - Specification for Oxygen
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in November 2016; originally published November 2003; previously published February 2011.
The purpose of this Document is to provide a series of specifications for different grades of Oxygen (O2) that are used in the semiconductor industry.
This Document covers requirements for all standard grades of oxygen used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C3 — Specifications for Gases