C05400 - SEMI C54 - Specification for Oxygen (O2)

SEMI C54 - Specification for Oxygen (O2) -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C54-0624 - Current

Revision

Abstract

 

1  Purpose
1.1  This Standard provides a series of specifications for different grades of oxygen (O2) that are used in the semiconductor industry.
 

2  Scope
2.1  This Specification covers requirements for all standard grades of oxygen used in the semiconductor industry.

 

Referenced SEMI Standards (purchase separately)
SEMI C3 — Specification for Gases
SEMI C3.22 — Standard for Oxygen (O2), 99.5% Quality
SEMI C3.23 — Standard for Oxygen (O2), 99.98% Quality
SEMI C3.41 — Standard for Oxygen (O2), Bulk, 99.9998% Quality

 

Revision History
SEMI C54-0624 (technical revision)
SEMI C54-1116 (technical revision)
SEMI C54-1103 (Reapproved 0211)
SEMI C54-1103 (first published)

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