SEMI C56 - Specification for Dichlorosilane

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in November 2016; originally published March 2005; previously published February 2011.

 

The purpose of this Document is to provide a series of specifications for different grades of dichlorosilane (SiH2Cl2) that are used in the semiconductor industry.

 

This Document covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry.

 

If analytical methods are not complete, the requirements are presented as a guideline.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C3 — Specifications for Gases

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