SEMI C56 - Specification for Dichlorosilane (SiH2Cl2) -

Abstract

This Standard provides a series of specifications for different grades of dichlorosilane (SiH2Cl2) that are used in the semiconductor industry.

This Specification covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry.
 

If analytical methods are not complete, the requirements are presented as a guideline.

Referenced SEMI Standards (purchase separately)
SEMI C3.18 — Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality
SEMI C3.31 — Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional)

Revision History
SEMI C56-0224 (technical revision)
SEMI C56-1116 (technical revision)
SEMI C56-0305 (Reapproved 0211)
SEMI C56-0305 (first published - replaces SEMI C3.18 and SEMI C3.31) 

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