SEMI C58 - Specification for Hydrogen
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in November 2016; originally published March 2005; previously published December 2013.
The purpose of this Document is to provide a series of specifications for different grades of hydrogen (H2) that are used in the semiconductor industry.
This Document covers requirements for two grades of hydrogen used in the semiconductor industry.
If analytical methods are not complete, the requirements are presented as a guideline.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C3 — Specifications for Gases