SEMI C59 - Specification for Nitrogen

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at and in March 2017; originally published November 2002; previously published February 2011.


The purpose of this Document is to provide a series of specifications for different grades of nitrogen (N2) that are used in the semiconductor industry.


This Document covers requirements for all grades of nitrogen used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C3 — Specification for Gases

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