C06100 - SEMI C61 - Specification for Bar-Code Container Identification
NOTICE: This Document was balloted and approved for withdrawal in 2010.
To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI Specification.
This Guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases Specification or verification of performance to such a SEMI Specification.
Referenced SEMI Standards (purchase separately)
SEMI C1 — Specification for Reagents
SEMI C61-0707 (Withdrawn 0114)
SEMI C61-0707 (first published)
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