SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published November 2007; previously published March 2009.
The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which a need has been identified.
The scope of this Document lists the proposed impurity limits for porogen precursors (e.g., alpha-terpinine, limonene, bicycloheptadiene, and cyclooctane) used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
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