SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C62-0309 (Reapproved 0618) - Current



This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at and in June 2018; originally published November 2007; previously published March 2009.


The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which a need has been identified.


The scope of this Document lists the proposed impurity limits for porogen precursors (e.g., alpha-terpinine, limonene, bicycloheptadiene, and cyclooctane) used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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