SEMI C63 - Specification for Organosilicate Precursors Used in Low K CVD Processes
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published November 2007; previously published November 2008.
The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements. These test methods have been shown to give statistically valid results.
The scope of this Document lists the proposed impurity limits for organosilicate precursors (e.g., Dimethyldimethoxysilane, Octamethylcyclotetrasiloxane, Diethoxymethylsilane, Tetramethylcyclotetrasiloxane) used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals