SEMI C64 - SEMI Statistical Guidelines for Ship To Control

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at and in December 2014; originally published March 2008.


To provide a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining ship to control (STC) limits.


This Guide applies to specified properties of specific products for which it is desired to use statistically derived control limits upon which customer notification, negotiated disposition of product, or statistical specifications can be based.


Referenced SEMI Standards

SEMI C10 — Guide for Determination of Method Detection Limits

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