SEMI C64 - SEMI Statistical Guidelines for Ship To Control
To provide a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining ship to control (STC) limits.
This Guide applies to specified properties of specific products for which it is desired to use statistically derived control limits upon which customer notification, negotiated disposition of product, or statistical specifications can be based.
Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits
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