SEMI C67 - Guide for Hafnium Amides

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at and in March 2017; originally published August 2011.


The purpose of this Document is to provide a guide for hafnium amides for which a need has been identified.


The scope of this Document covers high purity hafnium amides, namely, tetrakis(dimethylamino) hafnium, tetrakis(diethylamino) hafnium and tetrakis(ethylmethylamino) hafnium which are used in the semiconductor industry for the deposition of hafnium oxide based layers by atomic layer deposition.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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