SEMI C68 - Guide for Zirconium Amides
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.
The purpose of this Document is to provide a guide for zirconium amides for which a need has been identified.
The scope of this Document covers high purity zirconium amides, namely, tetrakis(dimethylamino) zirconium, tetrakis(diethylamino) zirconium and tetrakis(ethylmethylamino) zirconium which are used in the semiconductor industry for the deposition of zirconium oxide based layers by atomic layer deposition.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals