SEMI C69 - ポリマーペレットの表面積を測定するための試験方法 -

Member Price: $155.00
Non-Member Price: $203.00

Volume(s): Process Chemicals
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI C69-0611 - Superseded



本スタンダードは,global Liquid Chemicals Committeeで技術的に承認されている。現版は2011513日,global Audits and Reviews Subcommitteeにて発行が承認された。20116月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。






Referenced SEMI Standards

SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing

SEMI F48 — Test Method for Determining Trace Metals in Polymer Materials

SEMI F57 — Provisional Specification for Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

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