SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at and in October 2015; originally published June 2011.


This Document provides a test method for the determination of the surface area of polymer pellets.


The determination of relatively accurate surface areas in polymer pellets is important in applications reaching across various microelectronics industries. For example, polymer pellets are used in the blow molding, rotomolding, injection molding, or extrusion of high purity components used in chemical distribution systems or lining sheets. Knowing the surface area is important when calculating surface contamination values and relating them to the finished component.


This Document outlines a test method using enhanced Euclidean techniques, where polymer pellets are treated as geometric shapes and measured to determine the dimensions.


Formulae are provided in Table A1-2 for calculating the surface area of a pellet, using the measured dimensions.


Values obtained using this method (m2 surface area per kilogram weight) can be used with documents such as SEMI F57 to determine contamination per unit of surface area.


Referenced SEMI Standards

SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
SEMI F48 — Test Method for Determining Trace Metals in Polymer Materials
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

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