SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets -

Abstract

NOTICE: This Standard was completely rewritten in 2024.
 

1  Purpose
1.1  This Test Method is a means of determining the surface area of polymer pellets.
NOTE 1: The determination of surface areas in polymer pellets is important in semiconductor device manufacturing. Polymer pellets are the typical raw material input form for several thermoplastic processing techniques (e.g., blow molding, rotomolding, injection molding, transfer molding, and extrusion) used to manufacture high purity components used in chemical distribution systems. Knowing the surface area is important when calculating surface contamination values and relating them to a finished component.
1.2  Values obtained using this method, reported in square meters surface area per kilogram mass (m2/kg), can be used with documents listed in § 4 to determine contamination per unit of surface area.
 

2  Scope
2.1  This Test Method uses Euclidean techniques. Polymer pellets are classified as one of the predetermined geometric shapes. A surface area per mass value is then calculated using the appropriate formula and the measured values.
2.2  Formulae are provided in Table A1-1 for calculating the surface areas of pellets, using the measured dimensions.

Referenced SEMI Standards (purchase separately)
SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing

Revision History
SEMI C69-1224 (technical revision)
SEMI C69-1015 (Reapproved 1220)
SEMI C69-1015 (technical revision)
SEMI C69-0611 (first published)

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