C0700 - SEMI C70 - Specification for Tungsten Hexafluoride (WF6)

SEMI C70 - Specification for Tungsten Hexafluoride (WF6) -

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Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C70-0924 - Current

Revision

Abstract

 

1  Purpose
1.1  The purpose of this Document is to provide specifications for tungsten hexafluoride (WF6) that are used in the semiconductor industry.
2  Scope
2.1  This Document covers requirements for tungsten hexafluoride used in the semiconductor industry.

 

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C3 — Specifications for Gases
SEMI C10 — Guide for Determination of Method Detection Limits

 

Revision History
SEMI C70-0924 (title update)
SEMI C70-1116 (title change)
SEMI C70-0611 (first published)

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