SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at and in August 2015; originally published June 2011.


The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry.


This Specification relates to a geometry of 0.5 µ or less (0.35 to 0.5 range) and describes analytical techniques using gas phase analysis.


If analytical methods are not complete, the requirements are presented as guides.


Referenced SEMI Standards

SEMI C3 — Specifications for Gases

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