C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry.


This Specification relates to a geometry of 0.5 µ or less (0.35 to 0.5 range) and describes analytical techniques using gas phase analysis.

 

If analytical methods are not complete, the requirements are presented as guides.

 

Referenced SEMI Standards (purchase separately)

SEMI C3 — Specification for Gases

 

Revision History

SEMI C71-0421 (technical revision)

SEMI C71-0815 (technical revision)

SEMI C71-0611 (first published)

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