SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published June 2011.
The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry.
This Specification relates to a geometry of 0.5 µ or less (0.35 to 0.5 range) and describes analytical techniques using gas phase analysis.
If analytical methods are not complete, the requirements are presented as guides.
Referenced SEMI Standards
SEMI C3 — Specifications for Gases