SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.
The purpose of this Document is to provide a guide for propylene-glycol-mono-methyl-ether (PGME), propylene-glycol-mono-methyl-ether-acetate (PGMEA) and the mixture 70wt% PGME/30wt% PGMEA for which a need has been identified.
The scope of this Document covers PGME, PGMEA, and the mixture 70wt% PGME/30wt% PGMEA which are used as solvents in the semiconductor industry for advanced resist technology.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals