SEMI C75 - Guide for Tetrakis(Dimethylamino)Titanium
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.
The purpose of this Document is to provide a guide for tetrakis(dimethylamino)titanium for which a need has been identified.
The scope of this Document covers high purity tetrakis(dimethylamino)titanium which is used in the semiconductor industry primarily, but not exclusively, for the deposition of titanium nitride layers by atomic layer deposition or chemical vapor deposition.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals