SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in August 2018; originally published September 2012; previously published June 2018.
This Document is to provide a test sequence for determining the counting efficiency of liquid-borne particle counters for which the minimum detectable particle size is between 30 nm and 100 nm.
This Document covers the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample.
This Document defines the test conditions for the counting efficiency test of liquid-borne particle counters.
The following areas are to be addressed in this Document:
• Mass concentration of original polystyrene latex (PSL) particle suspension
• Factor for calculating the dilution ratio such as fluid, flow rate, pressure, volume, PSL particle number concentration, etc.
• Type of an equipment under test (EUT) liquid-borne particle counter
• Type of PSL particles
• Description of the test report
Referenced SEMI Standards
SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing
SEMI F104 — Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems