SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS)

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to provide a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified.

 

The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemical

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