SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS)
The purpose of this Document is to provide a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified.
The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemical