SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS) -
Abstract
The purpose of this Document is to provide a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified.
The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemical
Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards. |
Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.
C08000 - SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS)
Sale price$187.00 USD
Regular price$150.00 USD (/)
This product has no reviews yet.