SEMI C81 - Guide for Tris(Dimethylamino) Silane (3DMAS)

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at and in June 2018; originally published January 2013.


The purpose of this Document is to provide a guide for tris(dimethylamino) silane (3DMAS) for which a need has been identified.


The scope of this Document covers high purity 3DMAS which is used in the semiconductor industry for the deposition of silicon oxide, silicon nitride based layers by atomic layer deposition.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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