SEMI C82 - Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C82-0713 (Reapproved 0819) - Current



This Document is to provide a standard of monodispersed gold nanoparticle (GNP) challenge test for liquid filter rated 20 to 50 nm using optical liquid-borne particle counter.


This Document covers a monodispersed GNP challenge test method for 20 to 50 nm rated liquid filter.


This Document defines a test condition for monodispersed GNP challenge test.


The following areas are to be addressed in this Document:

  • The test condition such as fluid, flow rate, pressure, GNP concentration, ligand concentration, membrane treatment etc.
  • The type of filter evaluated.
  • The type of gold nanoparticle (GNP) (reference material).
  • The method of membrane treatment prior to the test for decreasing the adsorbing effect.
  • The description of the test result.


Referenced SEMI Standards

SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing
SEMI F110 — Test Method for Mono-dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters

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