SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC)
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in February 2014.
The purpose of this Document is to provide a guide for methyl isobutyl carbinol (MIBC) for which a need has been identified.
The scope of this Document covers MIBC which is used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals