SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC)

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at and in February 2014.


The purpose of this Document is to provide a guide for methyl isobutyl carbinol (MIBC) for which a need has been identified.


The scope of this Document covers MIBC which is used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

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