SEMI C86 - Guide for Ethylene Glycol

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 11, 2014. Available at and in April 2015.


The purpose of this Document is to provide a Guide for ethylene glycol for which a need has been identified.


The scope of this Document covers grades of ethylene glycol which are used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemical

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