C08600 - SEMI C86 - Guide for Ethylene Glycol

SEMI C86 - Guide for Ethylene Glycol -

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Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C86-0415 - Inactive

Revision

Abstract

The purpose of this Document is to provide a Guide for ethylene glycol for which a need has been identified.

　

The scope of this Document covers grades of ethylene glycol which are used in the semiconductor industry.

　

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemical

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