SEMI C86 - Guide for Ethylene Glycol

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to provide a Guide for ethylene glycol for which a need has been identified.

 

The scope of this Document covers grades of ethylene glycol which are used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemical

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