SEMI C86 - Guide for Ethylene Glycol -
The purpose of this Document is to provide a Guide for ethylene glycol for which a need has been identified.
The scope of this Document covers grades of ethylene glycol which are used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemical
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C08600 - SEMI C86 - Guide for Ethylene Glycol
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