SEMI C87 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at www.semiviews.org and www.semi.org in May 2015.
This Document provides a test method for determining the roughness of polymer surfaces using contact profilometry (CP).
In microelectronics, the need to accurately determine roughness of polymer surfaces is important when evaluating fluid handling system components from various sources. Rough surfaces have been known to contribute to the shedding of particles, encourage the harboring of micro contamination and promote the proliferation of bacteria. This method can also be used for other applications outside of microelectronics.
The use of CP for measuring the roughness of polymer surfaces is outlined in this Test Method. CP uses a stylus or probe tip that interacts with the surface of interest and moves at a known speed across the surface while recording the up and down movement of the tip relative to the surface, to profile the sample topography.
Values of the scan obtained using this method are reported in Ra and Rq. Refer to ISO 4287 for information about these terms.
Referenced SEMI Standards