SEMI C88 - Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems -

Abstract

NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F117.

 

This Standard establishes the physical dimensions of filters, check valves, restrictors, port converters and other components for 1.125 inch type surface mount gas distribution systems.

This Standard applies to components that are installed in between a substrate and a component in a sandwich or stacked manner.

 

This Standard establishes standard dimensions to provide interchangeability for components of equivalent function.

 

This Standard applies to two and four fastener configurations.

 

This Standard only applies to components for systems which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44.7 psia).

 

This Standard only applies to components with operating pressures less than 3445 kPa (500 psia) at 20°C.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI C88-0815 (replaced by SEMI F117)

SEMI C88-0815 (first published)

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