SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS)

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 10, 2015. Available at and in January 2016.


This Document is to provide a standard of mono-dispersed gold nanoparticle (GNP) challenge test for liquid filter rated below 30 nm using inductively coupled plasma-mass spectroscopy (ICP-MS).


This Document covers a mono-dispersed GNP challenge test method for below 30 nm rated liquid filter.


This Document defines a test condition for mono-dispersed GNP challenge test.


The following areas are to be addressed in this Document:

  • The test condition such as fluid, flow rate, pressure, GNP concentration, ligand concentration, membrane treatment etc.

  • The type of filter evaluated.

  • The type of GNP.

  • The method of membrane treatment prior to the test for decreasing the adsorbing effect.

  • The description of the test result.


Referenced SEMI Standards

SEMI C79 — Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distributions Systems
SEMI C82 — Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm with Liquid-Borne Particle Counter
SEMI F110 — Test Method for Mono-Dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters

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