SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems -

Abstract

1 Purpose

1.1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e.g., tubing, fittings, and valves).

1.2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components.

2 Scope

2.1 This Standard applies to the determination of metal extractable impurity characteristics of high purity materials and the wetted surfaces of components and equipment used in chemical distribution systems.

2.2 This Standard establishes limits on impurities extractable from components.

NOTE 1: Although no limits are imposed on extractable contaminants from resin pellets by this Specification, Related Information 1 provides a table of typical values.

2.3 This Standard includes instructions to prepare extractants for analysis by exposing raw materials, components, or assemblies to nitric acid.

2.4 This Standard defines preparation and pretreatment procedures used for the evaluation of liquid chemical distribution system materials in a test fluid.

2.5 This Standard defines the method to determine background purity (method blank) and the maximum background contaminant values acceptable for a valid test.

Referenced Standards (purchase separately)

SEMI C69 — Test Method for the Determination of Surface Areas of Polymer Pellets

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies

SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing

SEMI F57 — Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

Revision History

SEMI C90-00-0725 (complete rewrite)

SEMI C90-00-1015 (first published)

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