SEMI C90 - Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2015. Available at www.semiviews.org and www.semi.org in October 2015.
This Document defines perfluoroalkoxy (PFA) resin and component preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and resin.
This Document includes preparation and testing procedures that can be applied to PFA resin pellets, tubing and other components used in liquid chemical distribution systems.
This Document defines preparation and pretreatment procedures used for the evaluation of liquid chemical distribution system sample materials in test fluids. This Document defines the purity of chemicals that can be used for leaching and rinsing these samples.
This procedure applies to sample leaching at 70°C and ambient temperature for the analysis of iron levels.
Referenced SEMI Standards
SEMI C35 — Specifications and Guideline for Nitric Acid
SEMI C69 — Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI F48 — Test Method for Determining Trace Metals in Polymer Materials
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
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